工业生产型PCVD法工模具表面强化设备及其应用  

New Mass production type PCVD Equipment for Surface Strengthening and Its Application

作　　者：陶冶[1] 张凌云[1] 刘培英[1] 

机构地区：[1]北京航空航天大学

出　　处：《航空制造工程》1997年第1期3-6,共4页Aviation Engineering & Maintenance

摘　　要：介绍了一种新型的用于工业生产的ＰＣＶＤ法工模具表面强化设备。设备的有效容积为φ４８０ｍｍ×８００ｍｍ，装载量可以达到３００ｋｇ以上。其中自行设计的内热式加热系统，采用了高压脉冲等离子电源和多路蒸发系统。用该设备可以制备ＴｉＮ系薄膜和ＴｉＳｉＮ、ＴｉＡｌＮ等三元系薄膜，批量处理各类金属切削刀具和模具，并且显著提高工模具的使用寿命。还介绍了有关的工艺技术和设备技术。A new mass production type PCVD equipment for surface strengthening of tools and /or dies is introduced in this paper. The effective capacity of the equipment is of φ480mm×800mm, and the loading capacity can be more than 300kg. There are advanced design of the inner heating system which uses the high voltage and pulsed plasma power and multiple path vaporization system. Not only can TiN type coating but polybasic coatings of TiSiN, TiAlN be prepared with the equipment. Also various cutting tools and dies can be surface strengthened in batches and the service life of tools and dies can be markedly prolonged.

关 键 词：PVCD设备 表面强化 刀具 模具 

分 类 号：TG71[金属学及工艺—刀具与模具] TG76