湿化学方法制备Sb2S3玻璃薄膜  

Antimony Sulfide Glass Films Prepared by a Wet-chemical Process

作　　者：徐键[1] 王公平[1] 董建峰[1] 沈祥[1] 

机构地区：[1]宁波大学信息科学与工程学院,宁波315211

出　　处：《武汉理工大学学报》2007年第E01期281-283,共3页Journal of Wuhan University of Technology

基　　金：国家科技部国际科技合作重点项目（2006DFA52910）,浙江省科技厅项目（2006R10038）和教育部留学回国人员科研基金.

摘　　要：Sb2S3薄膜在非线性光学和太阳能电池方面具有重要的应用。以SbCl3为原料，用湿化学方法制备了Sb2S3薄膜。用XRD、DSC、FTIR和XPS等对薄膜进行了结构表征，用椭圆偏振仪测试了薄膜的折射率。研究结果表明：所得薄膜为非晶态，其析晶温度约250℃，折射率约2．98，薄膜组成计量接近Sb2S3。Antimony sulphide films on substrates were prepared via wet chemical processing, using SbCl3 as the precursor. Films were characterized with respect to their crystallization and composition by means of XRD, DSC, FTIR and XPS. Ellipsometry was used to measure refractive index of the films. The results indicated that amorphous sulfide films with refractive index near 2.98 and the composition stoichiometry close to Sb2S3 have been obtained; the crystallization temperature of the Sb2S3 glass films was -250 ℃.

关 键 词：玻璃薄膜 硫化锑薄膜 湿化学制备 

分 类 号：TQ171[化学工程—玻璃工业]