一种非球面测量的新方法  

Study on A Novel Method of Aspheric Measurement

作　　者：黄大刚[1] 王宝光[1] 朱连津[2] 徐宁[2] 

机构地区：[1]天津大学精密测量技术与仪器国家重点实验室,天津300072 [2]南开大学信息技术科学学院,天津300071

出　　处：《传感技术学报》2007年第5期1158-1161,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助"多维坐标系统中复杂形体的虚拟定位技术研究"(59875066)

摘　　要：提出一种基于光镊技术测量非球面面形的新方法.用光镊将直径为微米级的高分子小球移动到被测表面上,小球折射产生的球面波与平面波干涉,形成牛顿环.在相互垂直的二维标尺上分别测量两组牛顿环中心位置,得到小球的三维坐标.光镊对小球只产生亚皮牛量级的作用力,小球对被测表面的弹性变形可以忽略.通过测量若干小球坐标后,可拟合出三维曲面.A novel method for measuring the shape of aspheric surface based on optical tweezers was presented. A macromolecule ball with micron scale diameter is moved on the tested surface by an optical tweezers, and Newton rings are formed while a plane wave interfering with a spherical wave refracted by the ball. The center coordinates of two groups of Newton rings are measured respectively on two pieces of 2D scale plates with a perpendicular relationship. Then the three dimension coordinates of the ball are calculated. The elasticity deformation that is generated by the ball may be ignored because the action from the tweezers to the ball is only in a scale of 10^-10N. The 3D aspheric surface can be obtained through fitting the measured coordinates of the ball.

关 键 词：非球面测量 光镊 聚苯乙烯小球 牛顿环 二维标尺 

分 类 号：TN407[电子电信—微电子学与固体电子学]