三氯化铁溶液中影响铁镍合金蚀刻速率的因素  

INFLUENCING FACTORS ON ETCHING RATES OF IRON NICKEL ALLOY FOILS IN FERRIC CHLORIDE SOLUTION

作　　者：刘飘[1] 堵永国[1] 张为军[1] 芦玉峰[1] 杨娟[1] 马占东[1] 

机构地区：[1]国防科技大学航天与材料工程学院,长沙410073

出　　处：《腐蚀与防护》2007年第5期238-241,共4页Corrosion & Protection

摘　　要：采用浸渍蚀刻的方法,研究了影响Fex(x=56-59)Ni1-x合金箔在三氯化铁溶液中蚀刻速率的几个因素,并对蚀刻液的有效蚀刻能力及失效蚀刻液的除镍和再生进行了初步的研究。研究结果表明:氧化还原电位随蚀刻液浓度的增大而升高,氧化还原电位越高,蚀刻反应趋势越大;蚀刻速率随浓度的增加先增大,再下降,且在浓度为40%左右出现极大值;蚀刻液温度越高、pH值越小,蚀刻速率越大;除镍后的失效蚀刻液经再生后能达到新鲜蚀刻液的90%以上,基本达到再生利用的要求。Several factors affecting the etching rates of Fex（x=56-59）Ni1-x alloy foils in FeCl3 etchant were studied with an immersion etching method. Especially, the quantity of Fex（x=56-65） Ni1-x alloy foils being dissolved in FeCl3 etchant, regeneration of spent etchants and replacement of nickel ions in FeCl3 waste etchants were also studied. The redox potential of etchants increased with increasing etchant concentration. The higher the redox potential, the bigger the etching trend. And the etching rate increased at first and then decreased with increasing concentration. The max of rate appeared when the concentration was about 40%. Etching rate increased with increasing temperature and decreasing pH.

关 键 词：FE-NI合金 蚀刻速率 再生 FECL3 蚀刻废液 

分 类 号：TG172.6[金属学及工艺—金属表面处理] TB34[金属学及工艺—金属学]