Development of Miniature Spectrometers  

作　　者：ZHANG Zhi-guo 

机构地区：[1]The Educational Administration of Beihua University, Jilin 132013, CHN

出　　处：《Semiconductor Photonics and Technology》2007年第2期132-135,共4页半导体光子学与技术（英文版）

摘　　要：Spectrometer is an essential and necessary optical element used for measuring the chemical components and content of the matter. The development of miniature spectrometers can be traced back to 1980s. The development state and different manufacturing methods of micro-spectrometers are presented. Finally, we analyze the miniaturization trend of spectrometers. Some groundwork for the scientific research is offered by introducing micro-spectrometers development.Spectrometer is an essential and necessary optical element used for measuring the chemical components and content of the matter. The development of miniature spectrometers can be traced back to 1980s. The development state and different manufacturing methods of micro-spectrometers are presented. Finally, we analyze the miniaturization trend of spectrometers. Some groundwork for the scientific research is offered by introducing micro-spectrometers development.

关 键 词：MICRO-SPECTROMETER micro-opto-electro-mechanical system （MOEMS） Fourier transform interferometer（FTS） spectroscopy 

分 类 号：TH744[机械工程—光学工程]