Mo-Al_2O_3金属陶瓷颗粒膜的光学常数研究  

Optical Constants of Mo-Al_2O_3 Cermet Granular Films

作　　者：周珑[1] 王天民[1] 杜心康[1] 陈步亮[2] 茹宁[1] 王聪[1] 

机构地区：[1]北京航空航天大学凝聚态物理与材料物理研究中心,北京100083 [2]中国空间技术研究院,北京100029

出　　处：《稀有金属材料与工程》2007年第5期825-829,共5页Rare Metal Materials and Engineering

基　　金：国家自然科学基金(50471004);北大工程院研究基金(No.204031);新世纪优秀人才支持计划资助

摘　　要：采用磁控溅射技术在不锈钢片上沉积了Mo-Al2O3金属陶瓷混合膜,将Maxwell-Garnett等效媒质理论应用于Mo-Al2O3颗粒膜的光学常数分析,分别以Mo和Al2O3的块体材料和溅射薄膜的光学常数为基础,理论计算了不同金属填充因子金属陶瓷颗粒膜在300nm～800nm波段范围内的光学常数n,k随波长λ的变化规律,同时对理论计算结果与实验测试结果之间存在的差异及其产生的原因进行了讨论。The Mo-Al2O3 cermet granula films were deposited on stainless steel substrates by magnetron sputtering. The Maxwell-Garnett equivalent medium theory was used to analysis the optical constants of Mo-Al2O3 granular films. The optical constants, such as n and k, and their variations with wavelengths of from 300 nm to 800 nm were studied for the Mo-Al2O3 granular films based on the optical constants of bulk material and thin films of Mo and Al2O3. The possible reasons for the disagreement between theory and experiment were explained at the same time.

关 键 词：等效媒质理论 Mo-Al2O3金属陶瓷 颗粒膜 Maxwell-Garnett理论 光学常数 

分 类 号：O484.41[理学—固体物理]