基于压电泵自主流体驱动的新型精密位移机构  

New Type of Precise-motion Mechanism Driven by Piezoelectric Hydropump

作　　者：方科[1] 李欣欣[1] 杨志刚[1] 程光明[1] 

机构地区：[1]吉林大学机械科学与工程学院,长春130025

出　　处：《机械科学与技术》2007年第2期223-226,共4页Mechanical Science and Technology for Aerospace Engineering

基　　金：国家自然科学基金项目(50575093);国家"863"高技术研究发展计划项目(2002AA423150)资助

摘　　要：提出了一种新型的位移精密驱动机构,它以主动阀压电泵为核心驱动装置,通过流体的转移来改变缸体液体容积的变化,从而实现位移进给;该机构可以通过电压调整输出力和步长,满足大行程或微位移、高精度的输出要求。文中详细描述了该机构的结构、原理、控制方法,初步实验证明该机构可行性较强。A new type of precise-motion mechanism driven by a piezoelectric hydropump with active valves transfers liquid from one region to another, changes the liquid volume inside the cylinder and thus achieves displacement and feed. The mechanism adjusts its output force and step length through voltage, meeting the output requirement for long-stroke, high-precision or micro-motions. Its structures, working principles and control method were described in the paper. An experiment shows preliminarily that the mechanism is highly feasible.

关 键 词：压电泵 精密驱动机构 主动阀 

分 类 号：TN384[电子电信—物理电子学]