大气状态下AFM阳极氧化加工重复性的研究  

Study on the Reproducibility of AFM Anodic Oxidation in Air

作　　者：祁森[1] 刘庆纲[1] 李锁印[2] 张超艳[1] 胡小唐[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072 [2]中国电子科技集团公司第十三研究所,石家庄050002

出　　处：《微纳电子技术》2007年第5期264-267,共4页Micronanoelectronic Technology

基　　金：天津市自然基金项目资助(06YFJZJC01000)

摘　　要：为实现多隧道结和多岛结构,针对室温大气环境下,利用AFM阳极氧化加工方法,对加工LT-GaAs衬底上的nm级厚度的钛膜的重复性进行了研究。本实验在一定的加工条件下,分别加工了点阵列和线阵列,通过最大残差法计算了它们宽度和高度的重复性百分比,得到所有的重复性百分比都小于1%,表明文中所提供的加工条件下,加工钛膜具有很好的重复性。同时,通过点阵列与线阵列的理论变换方法,进一步验证了在加工氧化钛线时采用0.1μm/s扫描速度的正确性。The reproducibility of AFM anodic oxidation at room temperature in air was studied and analyzed for the structure of multi-tunneling junctions and multi-islands. Under a certain condition, the lattice and line array was made on the nanometer titanium of the LT-GaAs substrate and their height and width were calculated by the method of maximum surplus error. The results are all less than 1%. This indicates that the surface of the titanium metal is oxidized well by AFM anodic oxidation under the processing conditions. The scanning speed 0.1 μm/s is approved to be right by the theoretical transform between the lattice and line array.

关 键 词：加工重复性 原子力显微镜阳极氧化加工 最大残差法 

分 类 号：TQ153.6[化学工程—电化学工业]