超半球形固体浸没透镜系统的亚表面显微  

The subsurface microscopy with hypersphere solid immersion lens

作　　者：孙策[1] 张耀举[1] 施华萍[1] 

机构地区：[1]温州大学物理与电子信息学院,浙江温州325027

出　　处：《光学技术》2007年第3期476-478,共3页Optical Technique

摘　　要：应用矢量衍射理论和薄膜光学方法,研究了有禁带存在时超半球形固体浸没透镜(SIL)系统的亚表面显微。模拟计算结果显示,光斑的强度,边瓣强度和光斑大小随禁带厚度发生振荡。光斑的大小和光斑的强度几乎是反相变化的。当禁带材料的折射率与固体浸没透镜(SIL)的折射率相匹配时,光斑的强度较大,分辨率较高。随着离开样品表面的距离的增加,光斑的强度不断减小,光斑的大小和边瓣强度逐渐增加。Using the vector diffraction theory and the film optics method, the subsurface microscopy was studied in a supersphere solid immersion lens（SIL） system with a gap between the SIL and the microscopy sample. Simulation results show that the intensity, size, and sidelobe-intensity of spot oscillate with the thickness of the gap. And the size of spot and the intensity of spot are almost out of phase with the variation of the gap＇ s thickness. The intensity of spot is large and the system＇ s resolution is high under the condition of the matching in refraction indices between the SIL and the material of the gap. The intensity of spot decreases but both its size and the sidelobe intensity increase as the distance apart from the surface of the sample.

关 键 词：信息光学 固体浸没透镜 亚表面显微 矢量衍射 

分 类 号：O438.2[机械工程—光学工程]