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机构地区:[1]清华大学精密仪器与机械学系精密测试技术及仪器国家重点实验室,北京100084
出 处:《清华大学学报(自然科学版)》2007年第5期651-654,共4页Journal of Tsinghua University(Science and Technology)
基 金:国家"九七三"重点基础研究项目(G1999033002)
摘 要:从矢量衍射理论出发,将入射到固体浸没透镜(SIL)底面的光场看成角谱积分形式,并将角谱分量分解为TE波和TM波,从而用隧道薄膜的特性矩阵方法求出相应的反射角谱分量。在稳相近似下得到入射到SIL底面以及反射的光能积分表达式,从而求出SIL的透过率。据此计算分析了SIL的透射率与薄膜厚度的关系。结果表明:随着厚度的增加,SIL透射率开始有一个很明显下降阶段,然后趋于稳定,而且超半球齐明SIL的透射率一般优于半球同心SIL的透射率。According to vector diffraction theory, the optical field incident on a facet of a solid immersion lens (SIL) is the integral of the angular spectrum, which is decomposed into TE and TM waves. The corresponding reflected angular spectrum is calculated using the tunnel thin film characteristic method. The expressions for the incident and reflected power flux over the SIL facet are then used to calculate the transmissivity. The results are used to analyze the relationship between the transmissivity and the thin film thickness. As the film thickness increases, the transmissivity initially decreases and then becomes stable. The transmissivity of a super hemispheric aplanatic SIL is better than that of a hemispheric SIL.
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