驱动电子墨水电子纸的柔性TFT背板制造技术  

Flexible TFT Backplane Fabricating Technologies for E-ink Based Electronic Paper Driving

作　　者：杨澍[1] 荆海[1] 廖燕平[1] 马仙梅[1] 孔祥建[1] 黄霞[1] 付国柱[1] 马凯[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所北方液晶工程研究开发中心

出　　处：《液晶与显示》2007年第2期167-175,共9页Chinese Journal of Liquid Crystals and Displays

基　　金：国家自然科学基金资助项目(No.60576056)

摘　　要：基于电子墨水技术的电子纸是目前最有竞争力的类纸媒显示器。实现电子墨水电子纸的柔性是这项显示技术的关键之一。文章分析了当前电子墨水电子纸的主要研究方向,详细介绍了基于金属柔性基板的TFT制造技术、基于固定塑料基板的以激光释放塑基电子工艺(EPLaR)为代表的TFT制造技术、以激光退火表面释放技术(SUFTLA)为代表的TFT转移技术以及有机薄膜晶体管(OTFT)技术等4项柔性TFT背板的主要实现方法。对比了它们的材料选取,工艺特点和器件性能,分析了各项柔性TFT背板工艺的优缺点,提出了改进方向。E-ink technology based electronic paper is the most competent paper-like display at present. To realize the flexibility of e-ink electronic paper is one of the most important aspects of this technology. This paper analyzed the key research directions of e-ink electronic paper at present; introduced four main methods to realize flexible TFT backplane in details, including： flexible metal foil substrate TFT manufacturing technology, fixed plastic substrate TFT manufacturing technology presented by Electronics on Plastic by Laser Release （EPLaR） process, TFT transferring technology presented by Surface Free Technology by Laser Annealing （SUFTLA） process, and Organic Thin Film Transistor （OTFT） technology. This paper also compared the materials, process specials, and device performances of these technologies, analyzed the advantages and disadvantages of each TFT backplane processes, suggested the improving trends.

关 键 词：电子纸 电子墨水 薄膜晶体管 柔性金属基板 激光释放塑基电子技术 激光退火表面释放技术 有机薄膜晶体管 

分 类 号：TN141[电子电信—物理电子学]