蝶形电极结构载流子注入全内反射交叉脊形光波导开关  

Intersectional Rib Optical Waveguide Switch With Bow-tie Electrode on Carriers Injection Total Internal Reflection

作　　者：李宝军[1] 刘恩科[1] 

机构地区：[1]西安交通大学微电子工程系,西安710049

出　　处：《Journal of Semiconductors》1997年第4期281-285,共5页半导体学报（英文版）

基　　金：国家自然科学基金

摘　　要：分析了一种蝶彩电极结构交叉脊形光波导开关．这种结构可使波导交叉角增大，反射损耗降低，传输端的消光比提高，波导的数值孔径变大，且有较小的串音．Reflection type optical switches with intersecting rib waveguide and bow-tie electrode are investigated. The results show that the intersecting waveguide structures with the bow-tie electrodes are helpful in realization of wide-deflection angle, low reflecting loss, large extinction ratio, large numerical aperture, and without remarkable adverse effects upon the crosstalk.

关 键 词：硅 光波导开关 交叉脊形 电极结构 

分 类 号：TN304.12[电子电信—物理电子学] TN814.6