共焦显微镜扫描工作台的系统建模与动态分析  

System Modeling and Dynamic Analysis for Scanning Work Table of Confocal Microscope

作　　者：吴耀春[1] 萧泽新[1] 刘惠娟[1] 

机构地区：[1]桂林电子科技大学光机电一体化研究所,桂林541004

出　　处：《光学与光电技术》2007年第3期20-21,36,共3页Optics & Optoelectronic Technology

摘　　要：共焦显微镜扫描工作台动态模型是研究控制系统的重要依据,它直接影响工作台的重复定位精度。提出了将机械部分和电气部分分开建模的方法,建立了系统数学模型,该方法具有较好的可移植性,建模过程简单,有利于分析系统各环节对系统控制性能的影响。在MAT-LAB/Simulink下进行仿真,2s内系统达到了稳定状态,证明了系统具有很好的动态特性,满足控制的要求。The dynamic model of confocal microscope scanning work table is one of the most important basis in studying the control system. It directly affects the repetition positioning accuraey of the work table. A method for modeling the mechanical part and the electrical part separately is proposed, and the system mathematical model is established. This method has good portability, and the modeling process is simple. It＇s favorable to analyse the effect of system segment on control performance Simulation is carried out via MATLAB/Simulink, and the system will be stablized in 2 s. The result shows that the system has good dynamic characteristics, and satisfies the requirement of control.

关 键 词：控制系统 动态建模 SIMULINK仿真 

分 类 号：TH742.9[机械工程—光学工程]