多层氧化物薄膜气体敏感特性的研究  

A Study of Gas Sensing Properties of The Multilayer Oxide Thin Films

作　　者：戴国瑞[1] 管玉国[1] 焦伯恒[1] 南金[1] 许秀来 韩征 朱勇 

机构地区：[1]吉林大学电子工程系

出　　处：《云南大学学报（自然科学版）》1997年第2期150-152,共3页Journal of Yunnan University(Natural Sciences Edition)

摘　　要：报道了采用ＰＥＣＶＤ方法制备多层薄膜材料，研究了不同结构薄膜材料的气敏特性，制得了具有优越性能的ＮＯｘ。We report that multilayer thin film material were prepared by means of PECVD method. Gas sensing propertise of the different that structure films were researched. The high performances of NOx,alcohol and TMA gas sensors were fabricated in this paper.

关 键 词：多层薄膜 气体传感器 敏感特性 氧化物薄膜 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]