二维光栅平面精密位移测量系统研究  

Research on the planar nanoscale displacement measurement system of 2-D grating

作　　者：夏豪杰[1] 费业泰[1] 王中宇[2] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,安徽合肥23009 [2]北京航空航天大学仪器科学与光电工程学院,北京100083

出　　处：《合肥工业大学学报（自然科学版）》2007年第5期529-532,共4页Journal of Hefei University of Technology：Natural Science

基　　金：国家自然科学基金资助项目(50375011);河南省杰出青年基金资助项目(02120001500)

摘　　要：文章利用二维衍射光栅作为测量基准进行平面微位移测量,采用偏振干涉的原理设计系统的光路。通过对干涉条纹的光电转换得到质量较好的正交信号,经对系统误差的补偿,把系统的测量结果与双频干涉仪进行对比,此系统可实现纳米级分辨率的二维平面测量。The planar displacement measurement method with 2-D diffraction grating is analyzed, and the optical system is developed based on interference of polarized laser beams. The orthogonal sine signal is acquired through photoelectric conversion and signal processing. With the bias error compensated, the final measurement results are compared with the dual-frequency laser interferometer, which shows that the system＇s resolution can reach nanoscale measurement.

关 键 词：二维光栅 平面位移测量 干涉信号 

分 类 号：TH741.6[机械工程—光学工程]