准分子激光刻蚀可变焦光路设计研究  

Study on zoom lens in excimer laser ablation systems

作　　者：钱晓峰[1] 陈涛[1] 祁恒[1] 

机构地区：[1]北京工业大学激光工程研究院,北京100022

出　　处：《激光技术》2007年第3期262-264,共3页Laser Technology

基　　金：国家自然科学基金重点资助项目(50335050);北京市自然科学基金重点资助项目(3031001)

摘　　要：为了研究在准分子激光刻蚀聚合物的过程中避免经常往复更换不同大小而形状相同的掩模的实验操作,保证实验的连续性和结果的真实性和可靠性,在实验的加工系统中基于变焦距系统的原理采用引入一个变焦物镜代替原来系统中普通物镜的方法,取得了一个准分子激光刻蚀可变焦光路系统.采用ZEMAX软件设计一个可变焦物镜镜头并分析了它的成像质量.经过ZEMAX软件的模拟,结果表明,此变焦镜头成像质量基本达到要求,缩小倍率在0.15～0.24范围内可连续变化.因此,使用这个变焦物镜,在同样的实验条件下,可以采用同一片掩模而不再往复更换掩模就可蚀刻出大小不同的结构;同时由于不再经常需要中断实验过程,保证了实验结果的真实性.该技术在激光蚀刻中有很大的可行性.In the process of excimer ablation, the template in different sizes should be changed to get different structure, which not only interrupts the continuity of the experiment but also disturbs the results if other equipments are touched when changing the templates. In order not to change the template time and again and reduce the influence to ensure the continuity and the reliability,a zoom lens was designed with the software of ZEMAX based on the zoom lens theory and was introduced to the machining system instead of normal lens. At last its imaging quality was analyzed. The simulation result proved that the system could get satisfactory results and its minification could be changed continuosly from 0.15 to 0.24. In this case many structures were obtained in this range at the same status and the other templates were not needed. Because the templates are not need to be displaced time and again, the results in the experiment are reliable. The technology using zoom lens instead of normal lens in the ablation by excimer laser is of great feasible.

关 键 词：光学设计与制造 变焦物镜 光线追迹 准分子激光 

分 类 号：TN202[电子电信—物理电子学]