分布式电导率在线测试分析系统  

Distributed Measure System of Water Electrical Conductivity

作　　者：张效玮[1] 贾科进[1] 林波[1] 孙以材[1] 

机构地区：[1]河北工业大学微电子所,天津300130

出　　处：《电子器件》2007年第3期1038-1041,共4页Chinese Journal of Electron Devices

摘　　要：介绍了一种应用于半导体清洗技术的分布式电导率在线测试分析系统,该系统基于CAN总线传输网络,真正实现了一个全数字化的,双向的、多结点的通信链接,系统是具有测量、控制、执行和过程诊断的综合控制网络,并可方便地扩展底层检测设备.还提出了一种值得探讨的测量电导率的新方法,该方法利用单片机C8051F040内部的比较器和捕捉计数器实现,大大简化了硬件电路设计,能实现自动换档,温度自动补偿,电导率超限报警等功能.This paper discussed the design of the distributed measure and control system of water electrical conductivity which based on CANbus and presented a novel method to measure water electrical conductivity. Using C8051F040 singleship microcomputer, the proposed method can simplify the circuit of electrical conductivity instrument system and improve the rate of data acquisition. It achieves atuomatic gearing, automatic capacitance compensation and atuomatic temperature compensation. The whole system can be used in industry for real-time measurement and monitor in a long distance.

关 键 词：水电导率 CAN总线 单片机C8051F040 电容效应补偿 

分 类 号：TH832[机械工程—仪器科学与技术]