化学水浴沉积时间对CdS薄膜性质的影响  

Effects of deposition time on the properties of chemical bath deposited CdS films

作　　者：刘琪[1] 冒国兵[1] 敖建平[2] 

机构地区：[1]安徽工程科技学院机械系,安徽芜湖241000 [2]南开大学光电子薄膜器件与技术研究所,天津30071

出　　处：《功能材料》2007年第6期968-971,共4页Journal of Functional Materials

基　　金：国家高技术研究发展计划(863计划)重点资助项目(2004AA513021);安徽省教育厅自然科学基金资助项目(KJ2007B062)

摘　　要：采用CBD法在醋酸镉溶液体系中制备CdS半导体薄膜,通过XRD、XRF、SEM和光学透过率谱等测试手段研究了沉积时间对CdS薄膜沉积过程和性质的影响。结果表明,随着沉积时间的增加,薄膜增厚;S/Cd原子比增加,但都为富Cd的CdS薄膜;XRD研究表明,薄膜结构由立方、六方混合相向立方相转变,(111)方向成为择优生长方向;SEM研究表明,随沉积时间增加,薄膜变致密,薄膜表面出现的白色附着颗粒增多,尺寸增大;沉积时间对薄膜的光学性质也有很大的影响,随着沉积时间的增加薄膜透过率减小,而禁带宽度值增大。Chemical bath deposition （CBD） of CdS semiconductor thin films in solutions of cadmium acetate are carried out. The effects of deposition time on the properties of CdS thin films were investigated. Deposition time was varied from 14min to 30min. The properties of the CdS thin films with different deposition time have been studied by XRD, XRF, SEM and Optical transmittance spectra. It revealed that the structure of CdS thin film which deposited with 14min is the mixture of hexagonal and cubic crystal. As increasing of the deposition time, the structure of CdS films was transformed to cubic and the S/Cd ration increased as the films are Cd rich. Scanning electron microscopy studies of the CdS thin films deposited by this method showed that the films were continuous, homogeneous and with high compactness. But with increasing of deposition time, there were many white particles on the surface of CdS thin films. The deposition time has greatly influenced the optical properties and the band gap of CdS thin films.

关 键 词：化学水浴沉积(CBD) CDS薄膜 沉积时间 Cu(In Ga)Se2太阳电池 

分 类 号：TK511.4[动力工程及工程热物理—热能工程]