Construction of Larger Area Density-Uniform Plasma with Collisional Inductively Coupled Plasma Cells  

作　　者：欧阳亮 刘万东 白小燕 陈志鹏 王慧慧 李弘 罗辰 吉亮亮 胡北 

机构地区：[1]CAS Key Laboratory of Basic Plasma Physics,Department of Modern Physics,University of Science and Technology of China,Hefei 230026,China

出　　处：《Plasma Science and Technology》2007年第3期265-268,共4页等离子体科学和技术（英文版）

基　　金：supported in part by National Natural Science Foundation of China(Nos.10675121,10333030)

摘　　要：The plasma density and electron temperature of a multi-source plasma system composed of several collisional inductively coupled plasma （ICP） cells were measured by a doubleprobe. The discharges of the ICP cells were shown to be independent of each other. Furthermore, the total plasma density at simultaneous multi-cell discharge was observed to be approximately equal to the summation of the plasma density when the cells discharge separately. Based on the linear summation phenomenon, it was shown that a larger area plasma with a uniform density and temperature profile could be constructed with multi-collisional ICP cells.The plasma density and electron temperature of a multi-source plasma system composed of several collisional inductively coupled plasma （ICP） cells were measured by a doubleprobe. The discharges of the ICP cells were shown to be independent of each other. Furthermore, the total plasma density at simultaneous multi-cell discharge was observed to be approximately equal to the summation of the plasma density when the cells discharge separately. Based on the linear summation phenomenon, it was shown that a larger area plasma with a uniform density and temperature profile could be constructed with multi-collisional ICP cells.

关 键 词：inductively coupled plasma COLLISIONAL MULTI-SOURCE plasma cell 

分 类 号：O53[理学—等离子体物理]