NEW SELF-MIXING MICRO-INTERFEROMETER BASED ON EXTERNAL PHASE MODULATION  

作　　者：GUO Dongmei WANG Ming 

机构地区：[1]Technology,Nanjing Normal University, Nanjing 210000, China

出　　处：《Chinese Journal of Mechanical Engineering》2007年第3期83-85,共3页中国机械工程学报（英文版）

基　　金：Selected from Proceedings of the 7th International Conference on Frontiers of Design and Manufacturing (ICFDM’2006);This project is supported by Na-tional Natural Science Foundation of China (No. 50375074);Specialized Research Fund for the Doctoral Program of Higher Education (No. 20050319007).

摘　　要：ASeblsf-tmraicxti：n gA innteewrf esreelnf-cme ioxcincgu rms iicnr oa -liansteerrf derioodmee t（eLrD b）a sbeyd r eofnl eecxtitnergn tahl ep lhiagshet fmroomdu ala tmioinrr oisr-plirkees etanrtgedet. in front of the laser. Sinusoidal phase modulation of the beam is obtained by an electro-optic crystal （EOC） in the external cavity. The phase of the interference signal is demodulated by Fourier analysis method. The combination of the modulation and demodulation decreases the sensitivity of the instru-ment to fluctuations of the laser power and the noise induced by environment. Experimentally, the new micro-interferometer is applied to measure the micro-displacement of a high precision commer-cial PZT with an accuracy of 〈10 nm.ASeblsf-tmraicxti：n gA innteewrf esreelnf-cme ioxcincgu rms iicnr oa -liansteerrf derioodmee t（eLrD b）a sbeyd r eofnl eecxtitnergn tahl ep lhiagshet fmroomdu ala tmioinrr oisr-plirkees etanrtgedet. in front of the laser. Sinusoidal phase modulation of the beam is obtained by an electro-optic crystal （EOC） in the external cavity. The phase of the interference signal is demodulated by Fourier analysis method. The combination of the modulation and demodulation decreases the sensitivity of the instru-ment to fluctuations of the laser power and the noise induced by environment. Experimentally, the new micro-interferometer is applied to measure the micro-displacement of a high precision commer-cial PZT with an accuracy of 〈10 nm.

关 键 词：Micro-interferometer Self-mixing interference Displacement measurement 

分 类 号：TH744.3[机械工程—光学工程]