强激光反射镜体结构对镜面热变形的影响  

Analysis of the effects of mirror structure on mirror surface thermo-deformation using finite element methods

作　　者：余亮英[1] 朱海红[1] 程祖海[1] 曹华梁[1] 

机构地区：[1]华中科技大学光电子科学与工程学院

出　　处：《华中科技大学学报（自然科学版）》2007年第6期108-110,共3页Journal of Huazhong University of Science and Technology(Natural Science Edition)

基　　金：国家安全重大基础研究项目(51328);国家高技术研究发展计划资助项目(2001AA822090)

摘　　要：对于高功率激光器谐振腔反射镜在高能光辐照下的热变形问题,通过对不同镜体结构的热变形的效果分析,说明镜体结构决定了热变形的效果.比较了不同的镜体结构镜面热变形的有限元软件计算结果,得到较优的镜体结构：对于圆形的Si反射镜,去掉光照背面中心区域以外的环形区域有利于减小热变形,环形区域保留5 mm厚比较适宜;光照背面的中心区域的直径大小为40-60 mm比较适宜.结果还表明,通过优化镜体结构的方式对减小镜面热变形是非常有效的.热台架实验结果与数值模拟结果相符.Through the analysis of the resonator mirror, which is radiated by high-power laser, the effect of the thermo-deformation will depend on the structure of resonator mirror. Compared to the different structures of the mirror by using finite element analysis, the optimal form was chosen. For the Si morror in circular shape, cutting the annular region beyond the centre zone on the irradiant back side, was useful to reduce the thermo-deformation. The suitable depth of the cut annular region was 5mm, and the suitable diameter of center zone was 40-60 mm. The analysis results showed that, optimizing the mirror structure is effective to reducing the thermo-deformation. Furthermore, the experimental result agree with the numerical simulations very well.

关 键 词：高能激光 有限元分析 热畸变 镜体结构 

分 类 号：TN248[电子电信—物理电子学]