Au-MgF_2团簇薄膜TEM图像二值化阈值选取的研究  

Study of grey level threshold selection of TEM images of Au-MgF_2 cluster film

作　　者：吕建国[1] 戴结林[2] 宋学萍[1] 孙兆奇[1] 

机构地区：[1]安徽大学物理与材料科学学院,安徽合肥230039 [2]安徽教育学院物理与电子工程系,安徽合肥230061

出　　处：《电子显微学报》2007年第3期189-194,共6页Journal of Chinese Electron Microscopy Society

基　　金：国家自然科学基金资助项目(No.50642038);教育部博士点专项基金(No.20060357003);安徽省人才专项基金(No.2004Z029);安徽省教育厅自然科学研究项目(No.KJ2007B135);安徽省高等学校青年教师科研资助计划项目(No.2006jql192);安徽大学人才队伍建设基金资助课题.~~

摘　　要：用透射电镜(TEM)观察磁控溅射制备Au-MgF2团簇薄膜的形貌,对团簇薄膜TEM图像采用灰度平均值法和Boltzmann拟合参数法进行二值化处理,并用分形理论表征薄膜中Au团簇的分布规律。结果显示:随着Au体积分数从6.0%增加到49.0%,用灰度平均值法所得分形维数由1.851增大到1.869,而由Boltzmann拟合参数法所得分形维数从1.669逐渐增大到1.941。两种方法所得分形参数均能表征Au团簇的尺寸和分布复杂程度随体积分数的变化规律,而由Boltzmann拟合参数法所得结果还能很好地表征不同体积分数薄膜Au团簇分布的差异性。Topography of the Au-MgF2 composite films, deposited by RF magnetron sputtering, was characterized with transmission electron microscopy （TEM）. We carried out the image binary by using the gray average method and the Boltzmann fit parameters method, and characterize the distribution of Au clusters by using fractal theory. The results shows that as Au volume fraction varying from 6.0% to 49.0%, fractal dimension increases from 1.8510 to 1.8688 for the gray average method, however, increases from 1.669 to 1.941 for the Boltzmann fit parameters method. Fractal dimension of the two methods can characterize the relation between size and distribution of Au clusters and Au volume fraction. But that of Boltzmann fit parameters method also be able to discriminate the dissimilarity of Au cluster films.

关 键 词：Au-MgF2团簇薄膜 TEM 二值化阈值 分形表征 

分 类 号：O561[理学—原子与分子物理]