小型薄膜气敏元件加热电阻的设计  

The Design of the Heating Resistance of the Thin Film Gas-Sensitive Devices

作　　者：黄光周[1] 于继荣[1] 杨英杰 

机构地区：[1]华南理工大学无线电工程系

出　　处：《真空电子技术》1997年第2期21-24,共4页Vacuum Electronics

摘　　要：主要讨论薄膜气敏元件加热电阻的设计及功耗的计算，同时也讨论加热电阻材料必须具备的条件。根据传热学原理，推导出计算功耗的表达式，并编制出相应的计算机程序。对于工作在３００℃时气敏元件功率损耗，其理论计算与实验相符。因此可根据该程序方便地计算出不同尺寸芯片在不同工作温度时相应的加热功率。The design of the heating resistance used in thin film gas sensitive devices and power loss of the resistors are discussed in this paper. It is also discussed that the materials used in the resistors have to meet the required conditions According to the principles of heat transmission,a calculating formula of its heating power is given and a corresponding program is developed. The results of theoretical calculation agree with measurement for power loss of the device working at 300 ℃.Thus the required heating powers can be calculated from the program for various sizes of chips and operating temperatures.

关 键 词：气敏元件 电阻器 功率损耗 传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TM540.2[自动化与计算机技术—控制科学与工程]