电阻蒸发铝薄膜结构及其对非晶硅太阳电池性能的影响  

Structural Characteristic of Thermal Evaporated Al Back-electrodes and Its Influence on the Performance of a-Si:H Solar Cells

作　　者：孙建[1,2,3] 薛俊明[1,2,3] 侯国付[1,2,3] 王锐[1,2,3] 张德坤[1,2,3] 赵颖[1,2,3] 耿新华[1,2,3] 

机构地区：[1]南开大学光电子薄膜器件与技术研究所 [2]光电子薄膜器件与技术天津市重点实验室,天津300071 [3]光电信息技术科学教育部重点实验室,天津300071

出　　处：《人工晶体学报》2007年第1期152-156,共5页Journal of Synthetic Crystals

基　　金：天津市科技发展计划项目(No.06YFGZGX02100);国家973计划项目(2006CB2026022006CB202603);天津市自然科学基金(No.043604911)

摘　　要：本文首先采用电阻蒸发法制备了不同厚度的Al薄膜,并选择了两个典型厚度的Al薄膜制备工艺来制备非晶硅太阳电池的Al背电极,研究了Al背电极厚度对电池性能的影响。结果表明,Al背电极的厚度由800nm减薄到70nm时,电池的Voc平均值由0.826V增加到0.829V,电池的Jsc平均值由11.747mA/cm2减小到11.318 mA/cm2,电池的FF平均值由0.701增加到0.728,而电池效率的平均值略有增加,由6.803%增加到6.833%。用扫描电镜(SEM)和X射线衍射(XRD)研究了玻璃衬底上蒸发的Al薄膜和非晶硅电池Al背电极表面形貌和微观结构的变化,分析了电池性能随Al背电极厚度变化的原因。In this paper, AI films with different thickness were prepared by thermal evaporation technique. The Influence of the Al back-electrodes on the performance of a-Si： H solar cells were studied. The results showed that, with the decreasing of Al thicknesses, Voc and FF increased, while Jsc decreased, and then the efficiencies increased from 6. 803% to 6. 833%. Scanning electron microscopy and X-ray diffraction techniques were used to identify the change in surface and microstructure of aluminum back electrodes. Finally, the dependence of a-Si： H solar cell performance on Al back electrode thickness and microstructure were analyzed in detail

关 键 词：电阻蒸发 Al背电极 非晶硅太阳电池 

分 类 号：O484[理学—固体物理]