柔性有机电致发光器件的制备  

Study of Flexible Organic Light-emitting Devices

作　　者：于军胜[1] 李璐[1] 涂霞[1] 林慧[1] 黎威志[1] 蒋亚东[1] 

机构地区：[1]电子科技大学光电信息学院电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《半导体光电》2007年第3期317-320,共4页Semiconductor Optoelectronics

基　　金："十一五"部级项目;电子科技大学"中青年学术带头人"基金资助项目

摘　　要：以柔性材料聚对苯二甲酸乙二酯(PET)为基底,在自行溅射的方阻为50Ω/□的氧化铟锡(ITO)导电薄膜上制备了结构为PET/ITO/NPB/Alq3/Mg∶Ag和PET/ITO/NPB/Alq3∶DCJTB/Mg∶Ag的绿色和红色器件,其最高亮度分别为18 cd/m2和170 cd/m2。利用原子力显微镜(AFM)表征了柔性ITO和有机薄膜的形态,结果表明,影响柔性电致发光器件性能的主要因素是ITO薄膜与PET基板的附着性问题,从而导致柔性基片在湿法刻蚀和清洗中ITO薄膜的剥离。另外,通过使用致密的氮化硅(Si3N4)绝缘层取代常规蚀刻的方法,制备了高性能的4×2阵列的柔性有机电致发光器件。Based on flexible PET plastic substrate covered with home magnetron-puttered indium tin oxide（ITO） transparent conducting film with sheet resistance as low as 50 Ω/□], green and red flexible organic light-emitting devices（FOLEDs） with the structure of PET/ITO/NPB/ Alq3/Mg ： Ag and PET/ITO/NPB/Alq3 ： DCJTB/Mg ： Ag were fabricated, and the maximum luminance reached 18 cd/m^2 and 170 cd/m^2 , respectively. The surface morphologies of ITO and organic films were investigated by atomic force microscope（AFM）. Results show that main factor influencing the performance of FOLEDs is the attachment force between ITO and PET substrate which may be delaminated from each other during wet etching and cleaning procedure. In addition, four 2-array FOLEDs with improved performance are succeeded through deposition of dense Si3N4 insulation layer instead of wet etching ITO film.

关 键 词：柔性有机电致发光 PET基板 ITO薄膜 原子力显微镜 

分 类 号：TN383.1[电子电信—物理电子学]