1.5 μm Ti:LiNbO_3电光波导强度调制器  

1.5μm Ti:LiNbO_3 ELECTROOPTIC WAVEGUIDE INTENSITY MODULATOR

作　　者：张伯华[1] 高福斌 金锋[2] 

机构地区：[1]北方交通大学 [2]中国科学院长春物理研究所

出　　处：《高速摄影与光子学》1990年第2期199-204,共6页

基　　金：863计划资助

摘　　要：用钛内扩散技术和常规光刻手段,研制出1.5μmLiNbO_3电光波导强度调制器。它由单模波导非对称Mach-Zehnder干涉仪和三电极共平面波导组成。干涉仪的两个臂长相差波导波长的四分之一,使器件在最佳线性点工作,无需外加电偏压。集总调制和行波调制的理论带宽分别为1GHz和7.8GHz。对于集总器件,测量了调制特性,半波电压为9.5V,调制带宽为0.7GHz。A 1.5μm LiNbO3 electrooptic waveguide intensity modulator has been developed by using Titanium indiffusion technique and common photolithographic method. It consists of a single-mode waveguide asymmetric Mach-Zehnder interferometer and a three-electrode coplanar waveguide. Two arms of the interferometer are different in length by one -quarter of a guide wavelength, allowing the device to operate at its optimal linearity point without external electrical bias. Theoretical bandwidths for lumped modulation and traveling-wave modulation are 1GHz and 7.8GHz, respectively. For the lumped device, modulation properties have been measured, its half-wave Voltage is 9.5V, and modulation bandwidth is 0.7GHz.

关 键 词：电光波导 调制器 LINBO3光波导 

分 类 号：TN761[电子电信—电路与系统]