Al_2O_3/ZrO_(2(n))微-纳米复合陶瓷超声振动精密磨削表面微观特征试验研究  

Study on Surface Integrity of Ultrasonic Vibration Grinding for Al_2O_3/ZrO_(2(n)) Micro-nanocomposites

作　　者：吴雁[1] 孙爱国[2] 赵波[1] 朱训生[1] 

机构地区：[1]上海交通大学机械与动力工程学院,上海200030 [2]中北大学机械工程学院,山西太原030051

出　　处：《航空学报》2007年第4期1009-1013,共5页Acta Aeronautica et Astronautica Sinica

基　　金：国家自然科学基金(50475060);山西省青年基金(2006021026);河南省创新人才基金(0421001200)

摘　　要：基于Al2O3/ZrO2(n)微-纳米复合陶瓷的“晶内型”微观结构,应用原子力显微镜(AFM)重点分析了微-纳米复合陶瓷二维超声振动磨削表面微观形貌。结合磨削表面X射线衍射定性分析与定量计算,研究了“晶内型”微-纳米复合陶瓷材料超精密振动磨削表面变质层结构。X射线衍射分析表明:二维振动磨削和普通磨削表面均以α-Al2O3和四方相ZrO2为主,存在少量单斜相ZrO2,磨削表面无非晶相产生;磨削表层和基体之间的过渡层的X射线衍射峰具有半峰宽化现象。AFM分析结果表明:细粒度金刚石砂轮普通磨削和振动磨削表面均无微裂纹和断裂破碎,磨削表面粗糙度是由不同幅值的多种波形叠加的结果;AFM轮廓特征分析表明:二维超声振动磨削表面峰谷较均匀,磨削表面均匀一致性优于普通磨削表面;材料晶化过程中产生的固有缺陷是限制硬脆材料近纳米表面形成的重要因素。The ＂transgranular＂ internal microstructure of ceramic composites, the crystalline phase of its composition and the measurement of the crystalline size are revealed. By atom force microscopy （AFM）, the surface topography and the microstructure of the two-dimensional ultrasonic vibration grinding ceramics are espe- cially analyzed. Experimental results show that the ductile deformation of dislocation glide and lattice distortion are the principal removal mechanisms of Al2O3/ZrO2 composites. The qualitative analysis and the quantity calculations of crystal size and lattice distortion by means of X-diffraction results indicate that the transition region of grinding superficial and basal body is the ductile deformation area of lattice distortion, the surface phases are composed of α-Al2O3, t-ZrO2 and small quality m-ZrO2, there are non-crystal in ground surface, and the full width at half maximum（FWHM） phenomenon of X-ray diffraction are observed. Experimental results of AFM show that the micro-crack and brittle fracture of the ground surface can not he observed, and the vibration ground surface is uniform. The inherent defects of ceramics have important influence on finish surface.

关 键 词：超声 二维振动磨削 微-纳米复合陶瓷 表面微观形貌 晶格畸变 

分 类 号：TG580.61[金属学及工艺—金属切削加工及机床]