New type gate electrode of CNT-FED fabricated by chemical corrosive method  

新型场发射器件中栅极的化学刻蚀制备(英文)

作　　者：陈静[1] 雷威[1] 

机构地区：[1]东南大学电子科学与工程学院,南京210096

出　　处：《Journal of Southeast University(English Edition)》2007年第2期241-243,共3页东南大学学报（英文版）

基　　金：The National Basic Research Program of China(973Program) (No2003CB314702,2003CB314706);the PhDPro-grams Foundation of Ministry of Education of China ( No20030286003);the Program for New Century Excellent Talents in Uni-versity (NoNCET-04-0473)

摘　　要：To obtain a triode structure canbon nanotube field emission display （CNT-FED）, the glass plate which contains a glass channels matrix is designed and used as the triode part of the CNT-FED. Normally, the gate electrode can be fabricated with screen printing methods and a channels matrix can be fabricated by two- faced chemical corrosion. By adjusting the etch time and the concentration of acid in the process, different shapes of the tunnels can be obtained. The size and morphology of channels are observed by a scanning electron microscope （SEM）, and the ingredients of the corrosion solution are detected by infrared ray （IR） analysis. Voltage is added to the triode structure for obtaining the brightness image of the spot on the screen. Eventually, the electron trace pulling from cathode to anode under an electric field is obtained by simulation. It is concluded that the simulation results accord with the experimental results which realize the optimized triode structure.为了得到碳纳米管场发射器件的三极结构,设计了一种新型栅极.在电极的制作过程中使用普通的丝网印刷方法,然后运用化学刻蚀的手段进行双面刻蚀制备出带有小孔阵列的栅极.在栅极制作过程中通过改变酸液刻蚀的时间和浓度,可以腐蚀出不同形状的小孔.运用扫描电镜(SEM)和红外光谱(IR)分析,得到小孔的尺寸、形貌和刻蚀液的成份,然后在三极结构上加电压显示出孔的亮度图像,最后对器件结构进行模拟,算出在电场条件下的电子从阴极拉到阳极基板的轨迹.模拟结果和实验结果一致,从而实现了对场发射三极器件的优化.

关 键 词：canbon nanotube field emission display （CNT-FED） gate electrode chemical corrosion glass hole 

分 类 号：TN104.3[电子电信—物理电子学]