原位模板法在铝基底上制备TiO_2纳米管阵列薄膜  

In-Situ Template Synthesis of TiO_2 Nanotube Array Films on Al Substrates

作　　者：蒋武锋[1] 凌云汉[2] 白新德[2] 李洪义[2] 苍大强[1] 

机构地区：[1]北京科技大学 [2]清华大学,北京100084

出　　处：《稀有金属材料与工程》2007年第7期1178-1180,共3页Rare Metal Materials and Engineering

基　　金：国家自然科学基金资助项目(50371044);河北省教育厅资助项目(2004318)

摘　　要：采用液相沉积法,将铝基多孔阳极氧化铝(AAO)模板浸入到(NH4)2TiF6溶液中,制备出高度有序的TiO2纳米管阵列薄膜,并在不同的温度下进行了热处理。用场发射扫描电子显微镜、透射电子显微镜和X射线衍射仪等手段对试样的微观形貌、结构及物相进行了表征。结果表明,TiO2纳米管的形貌依赖于AAO的特征,薄膜是由外径大约200nm,壁厚约40nm的TiO2纳米管阵列组成,薄膜厚度约25μm。原位模板法制备的TiO2纳米管阵列薄膜为非晶态,在400℃空气中焙烧2h转变为锐钛矿相TiO2。经过650℃焙烧仍保持纳米管结构,表现出较好的热稳定性。High density and uniform titanium dioxide nanotube array films on AI plate were successfully prepared via liquid phase deposition method by immersing the anodic aluminum oxide （AAO） templates on aluminum substrate in ammonium hexafluorotitanate aqueous solution. The samples were annealed at various temperatures. The morphology, microstructure and phase of the nanotube array films were characterized by field-emission scanning electron microscopy （FE-SEM）, transmission electron microscopy （TEM） and X-ray diffraction （XRD）. It was found that the morphology of TiO2 nanotubes, with the outside diameter of about 200 nm and the wall thickness of approximate 40 nm, depended on its AAO precursory template. The thickness of TiO2 thin films was about 25 wn. The as-deposited TiO2 nanotube array film was amorphous even up to 650 ℃, but transformed to be anatase after heat-treating at 400 ℃ for 2 h in air, showing well thermal stability.

关 键 词：二氧化钛 纳米管阵列薄膜 液相沉积 阳极氧化铝(AAO) 

分 类 号：O614.411[理学—无机化学]