基于半导体陶瓷技术的二氧化碳传感器研究  

Study on carbon dioxide gas sensors based on semiconductor ceramic technology

作　　者：修德斌[1] 王铁玲[2] 郭忠文[1] 韩德维[1] 

机构地区：[1]哈尔滨理工大学测量与通讯工程学院,哈尔滨150080 [2]中国电子科技集团公司第四十九研究所,哈尔滨150001

出　　处：《哈尔滨商业大学学报（自然科学版）》2007年第3期332-335,共4页Journal of Harbin University of Commerce：Natural Sciences Edition

基　　金：黑龙江省科技攻关项目(G99B2-11-1)

摘　　要：采用硬质酸盐方法制备出纳米BaTiO3粉末,利用半导体陶瓷技术掺杂CeO-AgNO3制造出对CO2气体敏感的功能材料.基于CaCO3和RuO2制作电极,NiCr丝加热.CO2气体传感器当加热到400-450℃时,CO2体积分数为100×10^-6-2 000×10^-6,传感器的特征阻值由600 kΩ变化到150 kΩ,函数关系呈良好的全对数线性,同时测定了元件的温度特性和湿度特性,提出了此种传感器工作时,为提高传感器测试准确性,应考虑环境温湿度补偿技术.The sensing material for CO2 is prepared with nano powders of BaTiO3, which are prepared by the precipitation method and doped with the CeO -AgNO3 by the semiconductor ceramic technology. The electrodes are fabricated based on the CaCO3 and RuO2. The NiCr thread is used as the heater. While the sensors are heated up to the temperature＂ range of 400 ℃ to 450 ℃, the responses to CO2 are measured. When the volume ratio of CO2 is ranging from 100 × 10 ^6 to 2 000 × 10 ^6, the sensor＇ s feature resistance is decreased from 600 kΩ to 150 kΩ, which shows good full logarithm relationship. The temperature and humidity characteristics of the sensing component are also measured. To improve the measurement correctness of sensors, the compensation technique should be considered.

关 键 词：复合氧化物 二氧化碳 气体传感器 温度 湿度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]