压电结构电/气转换器技术研究  

Study on the Technology of Electric-pneumatic Transfer with Piezoelectric Structure

作　　者：李东明[1] 孙宝元[2] 王伟[1] 

机构地区：[1]大连理工大学电子与信息工程学院,机械工程学院辽宁大连116023 [2]大连理工大学机械工程学院,辽宁大连116023

出　　处：《化工自动化及仪表》2007年第4期68-71,共4页Control and Instruments in Chemical Industry

基　　金：辽宁省基金资助项目(20061053)

摘　　要：通过压电执行器的选择,压力腔和节流孔尺寸的计算,设计了一种基于开关原理新结构压电微型阀,通过主控制电路设计,研发出一种基于压电微型阀结构的新型电子式电/气转换器,并对转换器整机的性能进行测试,为我国自主研发新一代电/气转换器、定位器打下了基础。A new structure of piezoelectric microvalve based on switching principle was designed via selection of piezoelectric actuator and dimension calculation of pressure chamber and throttling orifice. Based on the piezoelectric microvalve, a new type of electronic electric-pneumatic transfer was developed. Experimental results show the good capability of the transfer, which provides good basis of development of electric-pneumatic transfer with new piezoelectric structure.

关 键 词：电/气转换器 压电阀 压电执行器 双晶片悬臂梁 

分 类 号：TH703.65[机械工程—仪器科学与技术]