二维激光衍射法在直径测量系统中的应用  

The application of the diameter measurement system by using the two-dimentional laser diffraction method

作　　者：黄见洪[1] 史斐[1] 李锦辉[1] 郑晖[1] 许灿华[1] 林季鹏[1] 林文雄[1] 

机构地区：[1]中国科学院福建物质结构研究所,福建福州350002

出　　处：《电子技术应用》2007年第8期31-33,40,共4页Application of Electronic Technique

摘　　要：一种利用菲涅尔衍射效应精确测量工件直径的方法。该测量系统由处于相互垂直位置的两组激光二极管和线阵CCD组成,利用工件激光衍射图样获取投影边界,以几何方法计算工件直径。本系统以数字信号处理器作为数据处理芯片,用大规模可编程逻辑拓展系统功能并控制CCD的时序。该测量系统具有结构简单,测量精度高,抗干扰性强等特点。A method of measuring diameter precisely by the use of Fresnel diffraction phenomenon is put forward. The measurement system is composed of two sets of laser diode and CCD, which are arranged vertically each other. The system achieves the boundary of the part projection from the diffraction image and calculates the part diameter by using the geometry method. A digital signal processor is used as the core of the system, which extends the system functions and control the CCD＇s time by the application of CPLD. The measurement system is characterized by simply configuration, high precision, high anti-jamming.

关 键 词：菲涅尔衍射 直径测量 DSP CPLD CCD 

分 类 号：TN911.72[电子电信—通信与信息系统]