TiO_2-WO_3复合薄膜型气敏传感器性质研究  

Characterization of Gas Sensors Fabricated with TiO_2-WO_3 Composite Film

作　　者：冯庆[1] 王新强[1] 刘高斌[1] 王万录[1] 

机构地区：[1]重庆大学数理学院

出　　处：《真空科学与技术学报》2007年第4期278-281,共4页Chinese Journal of Vacuum Science and Technology

摘　　要：二氧化钛和三氧化钨是具有重要功能的无机n型半导体材料,常用来制备气敏传感器。本文利用电子束蒸发制备了TiO2-WO3复合氧化物薄膜,在500℃下退火2 h。通过SEM和XRD观察了该薄膜的形貌特性并进行了气敏测试。实验表明,该薄膜对酒精、丙酮和二氧化硫气体具有较强的敏感性。本文还研究了温度、复合浓度和气体浓度对薄膜气体传感能力的影响。Gas sensors were fabricated with TiO2-WO3 composite films grown by electron beam evaporation and annealed at 500℃for two hours. Its microstructures were characterized with X-ray diffraction（XRD） and scanning electron microscopy（SEM）. We found that the composite films are highly sensitive to alcohol, acetone and SO2. The influence of environment temperature, fdm composition and gas concentration on the gas sensitivity was also studied.

关 键 词：气敏传感器 电子束蒸发TiO2 WO3 n型金属氧化物 

分 类 号：TB43[一般工业技术]