射频无电极放电氮气等离子体光源研究  

Nitrogen Plasma Lamp Stimulated by RF Electrodeless Field Discharge

作　　者：李朝阳[1] 陈强[1] 张广秋[1] 

机构地区：[1]北京印刷学院等离子体物理与材料研究室,北京102600

出　　处：《真空科学与技术学报》2007年第4期346-349,共4页Chinese Journal of Vacuum Science and Technology

基　　金：北京市教委重点学科建设项目(No.E-b-05-74);北京市教委面上项目支持(No.KM200710015002);北京印刷学院青年基金(No.Eb-0619)

摘　　要：本文报道了一种利用射频无电极放电激励的氮气等离子体新型光源,测出了辐射光谱、光功率、工作气压等光源相关参数,优化实验条件得出的电光转换效率达22.05%。最后运用此光源成功的对一种印刷预涂感光版(pre-sensitive plate,PS版)进行了曝光,通过曝光前后PS版感光层颜色的光密度变化评价了感光效果。A novel type of plasma lamp, stimulated by RF electrodeless field discharge, was developed with an optimized electro-optical conversion efficiency of 22.05 %. Various factors, including its emission spectrum, its optical output power and its working pressure, were studied. The exposure effect of the pre-sensitive plate was evaluated by comparing color density of the photosensitive materials before and after the exposure.

关 键 词：射频无电极放电 等离子体光源 转换效率 预涂感光版 

分 类 号：O53[理学—等离子体物理]