O_2中α型射频放电的理论研究  

Theoretical Research on α-RF Discharge of Oxygen

作　　者：何凡[1] 王新兵[1] 肖丹[1] 张学玲[1] 

机构地区：[1]华中科技大学光电子科学与工程学院,武汉430074

出　　处：《光学与光电技术》2007年第4期1-3,共3页Optics & Optoelectronic Technology

基　　金：国家自然科学基金(60508006)资助项目

摘　　要：根据射频放电中电流连续性方程、稳态时电子数密度的连续性方程以及电子的能量平衡方程,建立了气体放电氧碘激光器中α型射频放电等离子体的理论模型,通过数值求解得到了射频放电等离子体中电场、电子数密度的空间分布,分析了放电参数对放电特性的影响。结果表明采用频率高的射频放电会使放电空间电场降低,电子数密度增加,从而有利于单重氧的生成,为提高气体放电中单重氧的产率提供了理论依据。The theoretical model of slab α-RF discharge plasma in oxygen-iodlne lasers is established according to the continuity equation of the current, the continuity equation of the electron in steady state and electron energy balanced equation. The spatial distributions of electric field and electron density are obtained by numerical method. The relations between parameters and characters of discharge are analyzed. It can be concluded that higher frequency RF discharge will reduce the electric field, and increase the electron density in discharge plasma region. It＇s benefit for the generation of O2 （a1 △g） at higher frequency RF discharge, which provides theoretical guidance for improving the productivity of the O2 （a1 △g） of gas discharge .

关 键 词：射频放电 等离子体 α型放电 氧碘激光器 

分 类 号：TN241[电子电信—物理电子学]