烷类特种气体分析装置的研制及其应用  

Development and Application of an Analyzer for Special Gases

作　　者：蒋文全[1] 崔熙钟[1] 林佳 任晓华[1] 

机构地区：[1]北京有色金属研究总院测试所

出　　处：《分析试验室》1997年第1期86-91,共6页Chinese Journal of Analysis Laboratory

摘　　要：研制烷类特种气体分析专用的多维气相色谱仪，特制的热导检测器，具有手动－自动功能。设计了输气－配气装置和多维气相色谱流程。以微机控制，可按编辑程序清洗系统，检查本底，自动进样，显示或打印谱图和分析结果。可检测多种烷类特种气体组份及其中氧、氮、一氧化碳和甲烷等痕量杂质。烷类特种气体组分的检测范围：ＳｉＨ４、ＣＨ４为０％～２０％Ｂ２Ｈ６、ＰＨ３为０％～２％，最小检测浓度分别为（×１０－４％（Ｖ／Ｖ））：Ｏ２１．０，Ｎ２１．５，Ｂ２Ｈ６５０，ＰＨ３５，ＳｉＨ４５，ＣＨ４１．５。该仪器可作为在线分析仪。已在非晶硅太阳能电池试线中使用多年。A multi dimensional gas chromatograph for the analysis of special gases has been constructed with a specially meade TCD.The gas supply compounding device and chromatographic flow system were designed.The analyzer was controlled by a micro computer,it can automatically clean the system,check the background,introduce the sample,show and print the chromatogram and results,etc.The contents of the special gases and gaseous impurities therein were determined.The analytical range of special gases are SiH 4 and CH 4 0%～20%;B 2H 6 and PH 3 0%～2% .The minimum detectable concentrations are (×10 -4 %):O 2 1.0,N 2 1.5,B 2H 6 50 ,PH 3 5,SiH 4 5 and CH 4 1.5.The analyzer can be applied to on line analysis.It has been applied in the production process of amorphous silicon solar cells for many years.

关 键 词：烷类 特种气体 多维气相色谱 气体分析 

分 类 号：O659[理学—分析化学]