实用化全固态266nm激光器的研究  

Practical All-solid-state 266 nm Laser

作　　者：耿爱丛[1] 张鸿博[1] 王桂玲[1] 薄勇[1] 许祖彦[1] 王晓青[2] 沈德忠[2] 

机构地区：[1]中国科学院物理研究所北京凝聚态物理国家实验室,北京100080 [2]清华大学化学系,北京100084

出　　处：《光电子．激光》2007年第7期767-769,共3页Journal of Optoelectronics·Laser

基　　金：国家"863"计划资助项目(2004AA31g140);国家自然科学基金资助项目(50132010)

摘　　要：报道了W级实用化全固态266nm紫外激光器的设计和应用。在简单紧凑的平平直腔内,使用声光Q进行调制,通过LD端面抽运Nd:YVO4激光晶体产生平均功率8W的1064nm近红外光。采用Ⅱ类临界相位匹配的KTP晶体进行腔内倍频,产生平均功率5W的532nm绿光。然后,采用Ⅰ类临界相位匹配CsLiB6O10(CLBO)晶体进行腔外四倍频,产生平均功率1.3W、脉宽约11ns和重复频率20kHz的266nm紫外激光。用该紫外激光器清洗发光二极管(LED)基板,结果表明:激光器性能稳定,清洗效果良好。Using a compact plane-plane linear cavity,a near-infrared beam at 1 064 nm with average output power of 8 W is generated from an acoustic-optic Qswitched diode-end-pumped Nd.. YVO4 laser. By employing the intracavity frequency doubling with a type Ⅱ critically phase-matched KTP crystal,a green beam at 532 um with average output power of 5 W is generated. By extracavity fourth-harmonic generation with a type Ⅰ critically phase-matched CsLiB6 O10 （CLBO） crystal, a UV laser at 266 um with average power of 1.3 W is obtained with a repetition rate of 20 kHz and a pulse width of about 11 ns. This UV laser has been applied to clean the light-emitting-Node（LED） basal board,and the steady operation and perfect cleaning effect are proved.

关 键 词：激光技术 全固态266nm激光器 四倍频 ND:YVO4 CsLiB6O10(CLBO) 紫外光 

分 类 号：TN248[电子电信—物理电子学]