宽角度入射400～700nm波段减反射薄膜的研究  

Study of Antireflection Coatings of 400-700 nm for Broad Angle Range

作　　者：徐晓峰[1] 杜西亮[2] 邢怀中[1] 范滨 张凤山[4] 

机构地区：[1]东华大学应用物理系,上海201620 [2]黑龙江大学电子工程学院,黑龙江哈尔滨150080 [3]日本光驰有限公司 [4]中科院上海技术物理研究所,上海200083

出　　处：《光电子．激光》2007年第7期886-888,共3页Journal of Optoelectronics·Laser

摘　　要：利用非均匀膜系理论设计宽角度多层减反射薄膜的方法,从理论分析了宽角度情况下的偏振光产生透过率不同的原因,选取了MgF2、HfO2和TiO23种材料作为折射率材料,选取BK7作为基底材料,模拟设计了光谱区在400～700nm波段、入射角为0～70°的多层减反射薄膜,其P光和S光透过率达90%以上。A method to design antireflection multilayer using the theory of inhomogeneous coatings was presented. The differ ence of transmittance is analysed with polarized light and incidence of broad angle. Antireflection multilayers of 400-700 nm with incidence angle form 0° to 70° have been designed by using MgF2, HfO2 and TiO2 as materials of multilayer and BK7 as material of substrate. The transmittance of s light and p light is over 90%. The new designing method of coatings has an important directing meaning in theory and the broad application in new optical coatings designs.

关 键 词：薄膜光学 非均匀膜系理论 多层减反射薄膜 偏振光 

分 类 号：TN873.06[电子电信—信息与通信工程]