超衍射相位板设计  

Design of superresolved phase plates

作　　者：谭又华[1] 肖诗洲[1] 郭锐[1] 王翔[1] 黄文浩[1] 

机构地区：[1]中国科学技术大学精密机械与精密仪器系,安徽合肥230027

出　　处：《中国科学技术大学学报》2007年第7期748-752,共5页JUSTC

基　　金：国家自然科学基金(50275140;50335050);中国高技术研究发展(863)计划基金(2006AA04Z311);中科院院长奖启动基金资助

摘　　要：对超衍射理论进行了研究和分析,通过利用优化算法设计了对应于横向、纵向,特别是三维超衍射的3种二元相位元件;模拟结果表明在飞秒激光微加工系统中,考虑双光子效应,这种相位元件的超衍射性能尤为理想.讨论了光源的光谱范围对相位元件超衍射效果的影响,结果表明当光谱较窄时,超衍射性能几乎与使用单波长光源时一样.所设计的超衍射相位元件可以应用于飞秒激光加工系统.Theoretical analysis for superresolution was presented. By employing a special optimization algorithm, three kinds of binary phase plates were proposed to obtain transversal and axial superresolution, especially three-dimensional superresolution. The simulation results demonstrate that the superresolution performances of such kind of phase plates are even better by taking two-photon absorption into consideration in the femtosecond laser micro fabrication system. Moreover, the influence introduced by finite spectral range of the light source was discussed. The results show that the performance of superresolved phase plates using narrow width spectral light source is practically as good as that using single wavelength light source. In conclusion, the designed superresolved phase plates can be successfully applied to a femtosecond laser micro fabrication system.

关 键 词：超衍射 相位元件 激光微加工 优化算法 压缩比 

分 类 号：TB133[机械工程—光学工程]