基于准连续介质法预测薄膜材料纳米硬度和弹性模量  

PREDICTIONS OF NANOHARDNESS AND ELASTIC MODULUS OF THIN FILM MATERIAL WITH THE QUASICONTINUUM METHOD

作　　者：黎军顽[1] 江五贵[1] 

机构地区：[1]南昌航空大学材料科学与工程学院,南昌330063

出　　处：《金属学报》2007年第8期851-856,共6页Acta Metallurgica Sinica

基　　金：国家重点基础研究发展计划资助项目G2003CB61503

摘　　要：采用准连续介质法模拟了单晶Al和单晶Cu纳米压痕实验中的初始塑性变形过程,获得了压头在不同压深下的加载和卸载曲线.在计算得到的载荷-压深曲线基础上,根据Oliver-Phart法计算了薄膜材料的接触刚度、纳米硬度和弹性模量,并与相关文献的实验结果进行了比较.研究表明,接触刚度-位移曲线呈线性关系;纳米硬度测量中存在尺寸效应,而在弹性模量测量中却不存在尺寸效应.单晶Al和单晶Cu纳米硬度和弹性模量计算值分别为(0.584±0.013)和(84.088±0.332)GPa,(0.755±0.027)和(131.833±4.449)GPa.预测值与实验结果吻合,表明使用该方法预测薄膜材料的纳米硬度和弹性模量是可行的.Quasicontinuum method was used to simulate the initial plastic deformation of both single crystals of aluminium and copper in nanoindentation test. The corresponding loading and unloading curves at different depths were obtained. Based on the calculated load-depth curves, the contact stiffnesses, nanohardnesses and elastic moduli for thin film materials were evaluated using the Oliver-Pharr method and were compared with experimental results in the publised literatures. The results show that the contact stiffness-displacement curves are linear, and the size effect exists in nanohardness measurement, but doesn＇t in elastic modulus measurement. The calculated nanohard- nesses and elastic moduli of both single crystals of aluminium and copper are （0.584±0.013） and （84.088±0.332） GPa, （0.755±0.027） and （131.833±4.449） GPa, respectively, which agree with the experiments indicating that the presented approach is reliable for prediction of the nanohardness and elastic modulus of thin film materials.

关 键 词：准连续介质法 纳米压痕 尺寸效应 纳米硬度 弹性模量 

分 类 号：TB383[一般工业技术—材料科学与工程]