盘片式光纤传感器灵敏度计算方法  

Sensitivity Calculation of Disk-Type Fiber-Optic Sensor

作　　者：王永杰[1] 李芳[1] 肖浩[1] 张松伟[1] 王锐[1] 刘育梁[1] 

机构地区：[1]中国科学院半导体研究所集成光电子学国家重点实验室,北京100083

出　　处：《光学学报》2007年第8期1387-1392,共6页Acta Optica Sinica

基　　金：中国科学院重大项目基金(KGCX1-SW-10)资助课题

摘　　要：系统地开展了对各类盘片式光纤传感器灵敏度的研究工作。以周边固支、中心镶嵌刚性质量块的盘片式光纤加速度传感器为例,分析了传感器弹性盘片上各点的应力应变状态;结合迈克耳孙干涉仪原理,建立了计算传感器加速度灵敏度的数学模型,并讨论了粘贴光纤盘的最佳尺寸。制作两个相应的传感器进行对比实验,验证了上述计算模型的正确性。采用上述模型系统地推导了不同边界条件情况下盘片式光纤传感器的粘贴区域和灵敏度计算公式。对盘片式光纤传感器如光纤加速度传感器、光纤压力传感器、光纤水听器等的设计制作具有理论指导作用。Taking the disk-type fiber optic accelerometer with a center-embedded and edge-fixed rigid mass block as an example, the stress and strain distribution on the flexural disk of the sensor is analyzed. The mathematical model for the acceleration sensitivity of the sensor is established based on Michelson interferometer principle, and the optimum sticking fiber disk dimension is discussed. Two sensors are fabricated and compared experimentally to verify the calculation model. With the above model, the sticking area and sensitivity calculating formulas are deduced under different boundary conditions. The result is useful for the design of disk-type fiber-optic sensors, such as accelerometer, pressure gauge and hydrophone.

关 键 词：光纤传感器 光纤加速度计 灵敏度计算 迈克耳孙干涉仪 弹性盘片 光纤圈 

分 类 号：TN253[电子电信—物理电子学] TP212[自动化与计算机技术—检测技术与自动化装置]