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作 者:马晖[1] 李丹[1] 皮德富[1] 李国桢[2] 曾群德[2] 黄江萍[2]
机构地区:[1]南京理工大学,南京210094 [2]昆明物理研究所,昆明650223
出 处:《红外与激光工程》1997年第3期35-39,共5页Infrared and Laser Engineering
摘 要:根据超导测辐射热计的理论,以YBCO为材料,制备的高温超导薄膜型红外测辐射热计,黑体响应度Rv>104V/W,D*>1010cmHz1/2W-1,NEP≈10-14WHz-1/2。测量和分析了器件的频率响应、噪声特性和其对1~15μm波段及118.8μm,337μm,570.5μm,699μm,1009.4μm等波长的光谱响应。测量结果表明,高温超导红外测辐射热计对整个红外波谱都有响应,但其性能在远红外波段衰减很厉害,因此,对器件的表面处理应是提高其长波性能的一个关键。On the basic theory of bolometer, with the characteristics of superconducting material which its small variation in range of superconducting changing temperature causes a sharp increasing of resistance C-orientation YBCO superconducting thin film is prepared by means of direct current RF sputtering. With the YBCO film, high Tc superconducting IR bolometer (HTSC IR bolometer ) is fabricated. Its property parameters are as follows: Rv > 104 V / W, D * > 1010cmHz1/2 W-1, NEP≈10 -14WHz-1/2. Frequency response, noise property and relative spectral response to 1 ~15μm, 118. 8μm, 337μm, 570. 5μm, 699μm and 1009. 4μm are tested and analyzed.The results show that high Tc superconducting will be a high sensitivity detector in the whole range of infrared spectrum as long as the surface processing technology of sensitive elements is improved.
分 类 号:TN214[电子电信—物理电子学] TM26[一般工业技术—材料科学与工程]
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