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出 处:《强激光与粒子束》2007年第7期1093-1097,共5页High Power Laser and Particle Beams
基 金:四川省科技攻关项目资助课题(2006Z01-028)
摘 要:针对高功率固体激光装置主放大器中以布儒斯特角放置的大型光学元件,设计了一套损伤在线检测系统。该系统利用望远系统倍率不变特性实现了多个光学元件在线等精度、等分辨率检测;采用景深理论,通过仔细调节孔径光阑的大小,以达到既能测量同一倾斜光学元件上的不同损伤点,又能减小相邻光学元件间损伤信息相互影响的目的。通过亮场成像纵向定位损伤位置,而利用暗场成像横向定位损伤的大小。实验证明了该方法的可行性和有效性。该检测方法适用于各种多个倾斜放置的光学元件的损伤在线检测。For the main light amplification of high-power solid laser devices, an on-line damage-detecting system is designed. With its invariable magnification specialty, a telescope is used to on-line detect any damage information on different optical components at equivalent precision and resolution. With the theory of depth of field, by accurately adjusting the size of exit aperture of the damage-detected system, we can obtain all kinds of damage on the same inclined optical component at the same time, and minimize the negative interaction between adjacent components. The brightness field imaging method is adopted to identify the damaged components, while the darkness field imaging method is applied to measure the distribution and sizes of damage spots on the same component. Experiments have proved that this kind of on-line detecting is feasible and applicable.
关 键 词:固体激光器 光学元件 在线检测 损伤检测 景深 布儒斯特角
分 类 号:TH247[机械工程—机械制造及自动化]
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