WO_3薄膜气敏光学传感特性研究  

Study on gas sensing optical properties of WO_3 thin films

作　　者：杨晓红[1] 王新强[1] 马勇[2] 冯庆[1] 

机构地区：[1]重庆大学数理学院,重庆400044 [2]重庆师范大学物理学与信息技术学院,重庆400047

出　　处：《功能材料》2007年第8期1254-1256,共3页Journal of Functional Materials

基　　金：重庆市科委资助项目(CSTC2005BB4204);教育部科学技术研究重点资助项目(207096)

摘　　要：WO3薄膜是良好的光学气敏传感器材料。采用溶胶凝胶法制备了WO3掺杂薄膜,对样品在不同浓度氢气气氛中的气敏光学性质、敏感度及响应时间进行了测试、分析和计算,并结合光传输理论给出了气敏薄膜的光学变化机制,理论分析与实验结论吻合。　Nano-WO3 film is the better optical gas sensor material.In this paper,nano-WO3 films were prepared by sol-gel technique.The transmissivity properties of the samples have been investigated in H2 gas with different concentration.The gas sensitivity and response time have been studied,too.Finally,the transmissivity change mechanism of gas sensitive thin films was explained based on the theory of optical transfer.The theory study was consistent with the experiments.

关 键 词：WO3薄膜 气敏 透光率 消光系数 

分 类 号：TN304.055[电子电信—物理电子学]