BST/Si-NPA复合薄膜的湿敏电容特性研究  

Capacitive Humidity Sensing Properties of BST/Si-NPA Composite Thin Films

作　　者：肖顺华[1,2] 李隆玉[1] 姜卫粉[1] 李新建[1] 

机构地区：[1]郑州大学物理系,材料物理教育部重点实验室,郑州450052 [2]桂林工学院材料与化学工程系

出　　处：《无机化学学报》2007年第8期1369-1374,共6页Chinese Journal of Inorganic Chemistry

基　　金：国家自然科学基金资助项目(No.10574112)。

摘　　要：本文采用溶胶-凝胶法和旋涂工艺,以Si-NPA为衬底,制备了钛酸锶钡(BST)/Si-NPA复合薄膜,并对其形貌、结构及湿敏电容特性进行了研究。结果表明,环境的相对湿度(RH)、测试信号频率和退火温度均对湿敏电容特性具有较大影响。在100Hz的测试信号频率下,当环境的相对湿度从11%上升到95%时,BST/Si-NPA湿敏元件的电容增量可达起始值的4400%,显示出较高的湿度敏感性。同时,元件的响应时间和恢复时间均约为42s,表现出较快的时间响应和均衡的吸附/脱附。最后,通过复阻抗法讨论了元件的感湿机理。　BST/Si-NPA composite thin films were fabricated based on Si-NPA substrate using sol-gel method and spin-coating technology. The morphology,microstructure and capacitive humidity sensing properties were investigated. Experimental results show that the capacitance strongly depends on relative humidity （RH）,measured frequency and annealing temperature. The capacitance increment was over 4 400% of its initial value when RH was increased from 11% to 95% at 100 Hz signal frequency,indicating high humidity sensitivity. At the same time,the response times both for RH-increasing process and RH-decreasing process were determined to be -42 s,respectively,showing rapid time response as well as time proportion in adsorption and desorption. In the end,the humidity sensing mechanism of BST/Si-NPA humidity sensors is discussed by double impedance method.

关 键 词：钛酸锶钡 硅纳米孔柱阵列 复合薄膜 湿敏电容特性 

分 类 号：TM283[一般工业技术—材料科学与工程] O614.24[电气工程—电工理论与新技术]