基体偏压对CrTiAlN镀层摩擦磨损性能的影响  

Influence of substrate bias voltage on friction and wear properties of CrTiAlN coatings

作　　者：严少平[1] 孙雅琴[1] 段冰[2] 张桂梅[1] 蒋百灵[2] 

机构地区：[1]安徽理工大学数理系,安徽淮南232001 [2]西安理工大学材料科学与工程学院,陕西西安710048

出　　处：《合肥工业大学学报（自然科学版）》2007年第8期966-970,共5页Journal of Hefei University of Technology：Natural Science

基　　金：国家高新技术研究发展计划(863计划)新材料领域项目基金资助(2005AA33H010);安徽理工大学引进人才基金资助项目(2004Yb09)

摘　　要：应用闭合场非平衡磁控溅射离子镀技术在高速钢和单晶硅基体上制备了一组随基体偏压变化的CrTiAlN梯度镀层,并测试了其摩擦学性能。结果表明,随偏压的增大,镀层的厚度、硬度、膜基结合强度和耐磨性能表现出先升后降、摩擦系数较低、具有良好的韧性;在-75 V左右偏压下沉积的镀层具有最佳的综合性能。通过XRD、SEM的分析表明,由CrN、TiN、AlN、Cr和Ti2N等微晶组成的复合镀层,晶粒细小,属于纳米级颗粒,从而使镀层具有良好的摩擦学性能。A series of CrTiAlN hard gradient coatings were produced using the closed field unbalanced magnetron sputter ion plating technique on M2 high speed steel and Si substrates with substrate bias voltage changing, and the friction and wear properties were studied. The test results of coating performance show that the thickness, micro-hardness, adhesion and wear resistance of the coating increase firstly and then fall along with the rise of the absolute value of minus bias voltage, and that the hard gradient coating has excellent toughness and low friction coefficient. The test results also show that the coatings deposited at -75 V have favorable comprehensive performance. The composition and structure of the coatings were studied using XRD and SEM. Analysis results indicate that the main part of the coating was formed as a nano-scale multilayer. The grains in the CrAlTiN coatings include CrN, TiN, AlN, Cr and Ti2N micro-crystal grains the size of which belongs to nano-scale, thus making the CrTiAlN hard gradient coating have excellent tribological performance.

关 键 词：非平衡磁控溅射离子镀技术 基体偏压 显微硬度 摩擦磨损性能 

分 类 号：TH117.3[机械工程—机械设计及理论]