石油机械大尺寸零件精密测量装置研究  

LARGE SIZE PRECISSION MEASURMENT DEVICE FOR PETROLEUM MACHINE

作　　者：周秀云[1] 周肇飞[1] 张涛[1] 

机构地区：[1]四川大学激光应用研究所

出　　处：《西南石油大学学报（自然科学版）》2007年第4期145-148,共4页Journal of Southwest Petroleum University(Science & Technology Edition)

基　　金：国家自然科学基金项目(50275101)

摘　　要：研究了一种可用于工业现场进行大尺寸零件精密测量的装置。该装置以有高稳定性和强抗干扰能力(室外时频率稳定性可达10-7)的双纵模热稳频He—Ne激光器为光源,其拍频频率约为790MHz,拍频波长λ约380mm,拍频波长为测量基准;以拍频波节点为对准标志,最邻近节点到被测点的尾数间距x1,x2用组合于同一光路中的分系统激光干涉仪测量,分辨率为0.08μm的方法来进行大尺寸L的测量。测试表明,此装置具有很好的环境适应性和同类仪器中最高的频差稳定度。整个测量系统可在0～20m范围内工作,测量不确定度优于±30μm/10m。对石油机械大尺寸零件测量的环境性和高精度性研究具有重要意义。A large-size device precissily measuring spares and being able to be applied on site t is studied in the paper.The frequency-stabilized He-Ne laser with thermoregulation is used as the light source,which operates on the double longitudinal modes and has high frequency stability and good anti-disturbance performance,the frequency stability is better than 10-7(in open air).It has the beat frequency about 790 MHz and beat frequency wavelength λ=380 μm which is benchmark of measurement.The node of the beat-wave is used as sampling flag and the distance between the node and the close measuring point is measured with double frequency interferometer,the large size L is measured with the resolution of 0.08 μm.The test indicates that the device has a high environment adaptability and highest frequency difference stability among the same kind of existing great size device.The measuring accuracy is better than ±30 μm/10m and the measuring range is 0～20 m.This results is important to resolve the ambivalent promble between environment and measure precision of large size in petroleum machine.

关 键 词：大尺寸测量 双纵模激光 拍频频差 高精度 不确定度 石油机械 

分 类 号：TE9[石油与天然气工程—石油机械设备] TH744.3[机械工程—光学工程]