衬底对沉积碳纳米管薄膜的影响  

Effects of Substrates on Deposition of Carbon Nanotube Films

作　　者：樊志琴[1] 李瑞[1] 蔡根旺[1] 杨培霞[1] 程仁志[1] 

机构地区：[1]河南工业大学理学院,郑州450052

出　　处：《人工晶体学报》2007年第4期894-897,868,共5页Journal of Synthetic Crystals

摘　　要：利用微波等离子体化学气相沉积(MPCVD)方法,分别在不锈钢衬底上和刻线的镍膜上直接沉积了碳纳米管膜。通过SEM、拉曼光谱和XRD表征,讨论了不同衬底对碳纳米管膜生长的影响。结果表明:在一定条件下,可在镍膜上沉积垂直于衬底的高度取向的碳纳米管,但在不锈钢衬底上却长出取向无序的碳纳米管膜,这说明衬底对碳纳米管的取向生长起着关键作用。　By microwave plasma chemical vapor deposition（MPCVD）,carbon nanotubes（CNTs） were synthesized on stainless steel plates and patterned Ni lines coated ceramic substrate,respectively.By the characteristics of scanning electron microscopy （SEM）,Raman spectroscopy and XRD,effects of substrates on deposition of carbon nanotube films were discussed.The experimental results show that carbon nanotubes were perpendicular grown on patterned Ni coated ceramic substrate and grovelingly grown on stainless steel plates.Which means that substrates influence on growth of CNTs film.

关 键 词：碳纳米管(CNTs) 镍膜衬底 不锈钢衬底 拉曼光谱 

分 类 号：O484[理学—固体物理]