压阻式压力传感器零点输出及其温漂研究  

Research of Offset and Its Temperature Drift of Piezoresistive Pressure Sensor

作　　者：许东华[1] 林惠旺[1] 张兆华[1] 谭智敏[1] 刘理天[1] 

机构地区：[1]清华大学微电子学研究所,北京100084

出　　处：《微纳电子技术》2007年第7期188-191,共4页Micronanoelectronic Technology

基　　金：浙江省科技攻关重大专项支持(2005C11015);北京市科委项目(GYYKW0507009)

摘　　要：零点输出及零点温漂是传感器制造中的重要指标。结合设计制作的压阻式压力传感器重点分析了零点输出的产生机理,并对其接头和布线失配、复合层结构造成的应力分布、光刻随机误差造成的电阻失配及其他效应进行了量的分析。同时分析了它们对零点温漂的影响。最后,给出了一种整体设计流程来控制零点输出与提高成品率。Offset and its temperature drift are the important parameters in sensor fabrication. The mechanism and quantitative analysis of offset was described with the piezoresistive pressure sensor. There are four aspects in all： connection and wiring mismatch, stress caused by multiple layers, resistor mismatch caused by lithography random error and other effects, whose influence on offset temperature drift was also analysed. Finally, a full design flow was provided for controlling offset and improving yield.

关 键 词：压阻式 压力传感器 零点输出 零点温漂 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]