硅基压电悬臂梁式微麦克风的设计与优化  

Design and Optimization of Piezoelectric Cantilever Microphone Based on Silicon

作　　者：方华军[1] 刘理天[1] 任天令[1] 

机构地区：[1]清华大学微电子学研究所,北京100084

出　　处：《微纳电子技术》2007年第7期210-212,共3页Micronanoelectronic Technology

摘　　要：设计了一种硅基PZT压电悬臂梁式微麦克风。这种微麦克风采用压电多层膜悬臂梁作为声压感受器件,采用有限元耦合场分析的方法对压电复合膜悬臂梁进行了有限元分析和模拟,研究了压电复合多层膜悬臂梁的结构参数与力学性能的关系,分析了影响微麦克风机电性能的多种因素,给出了优化的器件结构和工艺流程。A piezoelectric cantilevermicrophone based on silicon was described, which received acoustic pressure with a piezoelectric multimorph cantilever based on silicon. The piezoelectric microphone was simulated and optimized with FEA coupling field method, and the relations between structure parameters and the mechanical performance of the microphone were studied. Based on the analyses of mechanical performance, an optimal microphone structure was put forward and an optimal fabricating process was presented.

关 键 词：微麦克风 PZT 压电悬臂梁 

分 类 号：TN641[电子电信—电路与系统]